Local Heat Dissipation and Elasticity of Suspended Silicon

Micromachines, Free Full-Text

SOLVED: Q3. Design a process to fabricate a polysilicon cantilever

Chapuis (@POCdeLyon) / X

Crystals, Free Full-Text

Probing thermal transport across amorphous region embedded in a

a) Schematics of the nanoscopic tip-sample contact and the equivalent

Topographic images obtained from AFM, distributions of the associated

Main steps of the fabrication process. The suspended beam is

Jose Manuel Sojo Gordillo - Swiss Nanoscience Institute (SNI), University of Basel

Electrical conductivity (, in (a)) and thermal conductivity (, in (b)

Local Heat Dissipation and Elasticity of Suspended Silicon

Calculated elastic constants of pure and doped silicon versus

a) Topography and (b) thermal resistance maps of a clean suspended

a), (b) Photograph of the thermal evaporator instrument and the

P-Olivier CHAPUIS - Publications